Zygo ZPS Absolute Position Measurement System
ZYGO's new ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning.
- Non-contact optical measurement
- Repeatable absolute position measurement (≤ 0.5 nm, 3σ)
- High-precision system using proprietary compensation algorithms
- Ultra-compact sensors with no EMI sensitivity or heat generation
- Reliable telecom-proven fiber optic components
- Scalable, up to 64 channels
ZYGO's new ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning. The optical sensor system provides up to 64 synchronized channels of high-precision, non-contact, absolute position measurement over a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability. The optical sensors do not generate heat and are insensitive to electromagnetic interference, making the ZPS system ideal for high-precision applications that may be affected by these factors. The ultra-compact sensors connect to the compact centralized enclosure via fiber optic cables.
Applications
The ZYGO ZPS system is typically used in closed-loop feedback systems that require a continuous stream of high-precision position data from multiple sensors to compensate for drift and maintain precise positioning and alignment. The system can also be used as a tool in RD&E and manufacturing environments for alignment in test fixtures or to quantify dynamic mechanical performance.
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PERFORMANCE CHARACTERISTICS |
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Resolution |
10 pm |
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Scale Error |
≤ 8 ppm |
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Non-Linearity |
≤ ±1 nm |
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Noise(1) |
5 pm/√Hz (0 to 100 μm) 10 pm/√Hz (100 to 400 μm) 20 pm/√Hz (400 to 600 μm) |
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Drift |
0.1 nm/min (Short Term) 1.0 nm/day (Long Term) |
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Absolute Position Repeatability |
0.5 nm 3σ |
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Thermal Drift(2) |
0.1 nm/K |
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TARGET REQUIREMENTS(3) |
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Nominal Standoff |
3.5 mm |
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Measurement Range(4) |
±600 μm |
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Angular Range(4) |
1 mrad |
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Max. Precision Velocity |
30 mm/s |
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Target Reflectivity |
3% - 8% @ 1525 – 1570 nm |
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PHYSICAL CHARACTERISTICS |
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Dimensions (H x W x D) |
311 x 483 x 578 mm 19” Rack Mountable, 7U |
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Mass(5) |
30 kg |
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Max. No. of Channels |
64 |
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OPTICAL CHARACTERISTICS |
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Operating Wavelength |
1525 – 1570 nm |
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Max. Sensor Output |
< 1 mW |
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Laser Safety Rating |
1M |
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CLOCKING & COMMUNICATIONS |
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Interface |
sRIO and Ethernet |
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Reference Signal |
20 MHz |
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Digital Filter |
24 Hz to 104 kHz, programmable |
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Base Sample Period |
4.8 μs |
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Data Age |
16 μs (typical) |
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Data Age Uncertainty |
< 100 ns |
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SENSOR SPECIFICATIONS |
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Dimensions (Dia. x L) |
2.8 x 27 mm |
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Mass |
6 g |
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REFRACTOMETER SPECIFICATIONS |
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Dimensions (H x W x D) |
8 x 15 x 24 mm |
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Mass |
14 g |
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OPERATING CONDITIONS |
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Temperature |
0° to 50°C |
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Max. Temp. Variation |
±1°C |
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Pressure |
700 to 1150 hPa |
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Humidity |
0% to 70% (non-condensing) |
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