Zygo Qualifire™ Interferometer

Key Features in more detail:

Smart Accessories
Using a Zygo Smart Accessory enables Smart Setup features. Smart Setup automatically sets the instrument lateral resolution based on the accessory installed and, for Smart Transmission Spheres, the radius of curvature of the part. Then, an on-board factory calibrated system error map is automatically fit and subtracted from measured data, enabling the best metrology on the market with a reduced setup time.

Integrated Phase Measuring Receptacle (PMR)
The new integrated PMR design improves mechanical stability and alignment, reduces the risk of damage or misalignment and reduces the need for recalibration.

Flying Spot 
A Qualifire system with the Flying Spot Module installed gives a level of confidence not seen with other noise reduction systems. By removing coherent spatial noise and annoying coherent bullseye artifacts from the cavity, the Flying Spot gives the best signal to noise for high precision measurements. A Qualifire system with a Flying Spot Module enabled takes the best of Zygo’s patented Ring of Fire and Coherent Artifact Reduction System (CARS) technologies creating a single noise reduction solution.

Plano Cavity Autofocus 
For the highest resolution instruments on the market, a precise focus on the surface under test must be achieved. The Flying Spot Module allows for a phase-based autofocus method. This means that a very precise focus can be set on perfectly specular surfaces, without the need for edges, fiducials, reticles, or other physical artifacts necessary for manual or intensity-based focus. In fact, precise focus can be achieved without operator intervention.

Stable Zoom
This novel zoom method provides a stable optical alignment so that there is no shift in focus or image centring from 1x to 3x zoom. Because the optical system is diffraction-limited at all zooms, the Instrument Transfer Function (ITF) is also greatly improved making it easier to quantify mid-to-high spatial frequency features. Because there is no shift in image focus or centring when system magnification is changed, system error subtraction can be maintained for all zooms without loss of fidelity.

Improved User Experience
conveniently accessible power button and kinematic mounting feet make setup easier to use. Large control knobs allow for more accurate adjustments. Integrated handles ensure safe and secure handling.

Easier service
The sealed optical system and consolidated electronics makes swapping out various components straightforward without exposing the optics to contaminants.