Zygo Mx™ for Laser Interferometers

World Class Analysis & Control Software

Mx is the successor to the highly trusted MetroPro measurement and analysis suite. Mx continues the legacy of trustworthy metrology, powerful customization, and production friendly automation. Its workflow-based design guides users through the metrology experience from setup through analysis and reporting.

Interactive plots show full-area data in 2D or 3D, along with profile slices, Zernike analysis, slope analysis, and PSD views. Production quality analysis is made simple with built-in SPC, pass/fail indication, data reporting and run charts.

Robust measurements – ZYGO proprietary QPSI™ and DynaPhase® measurement acquisition technologies eliminate the effects of vibration in difficult metrology environments. These proprietary technologies, recently extended to the Verifire MST, mean you can always trust your data.

Support for your test setup – built-in support for every test in the Typical Interferometer Setup Guide from Double-Pass Corner Cube to Grazing Incidence. Have confidence in your test setup, your interferometric scale factor and your results.

Flexible Analyses – from robust fitting tools (including Zernike, Annular Zernike and Legendre polynomials) to slopes and power spectrum analysis, Mx offers the tools you need to manufacture to a drawing or understand your process.

Built in SPC analysis tools track results, monitor pass-fail criteria, and track process statistics. With electronic reporting and clear visual indicators, you can pass parts out of production quickly and never lose track of a test report.