Zygo Mx™ for 3D Optical Profilers

World Class Analysis & Control Software

Mx is the successor to the highly trusted MetroPro measurement and analysis suite. Mx continues the legacy of trustworthy metrology, powerful customization, and production friendly automation. Its workflow-based design guides users through the metrology experience from setup through analysis and reporting.

Interactive plots show full-area data in 2D or 3D, along with profile slices, material ratio, slope analysis, and PSD views. Production quality analysis is made simple with built-in SPC, pass/fail indication, data reporting and run charts.

Mx Highlights

Robust measurements – Mx-powered acquisition captures topography data for your most critical parts, even on rough and angled surfaces, even in challenging environments. ZYGO’s exclusive technology provides more data, more easily.

Flexible analyses – from ISO compliant filtering for roughness and flatness, to automated segmentation for defect detection, to feature recognition and gaging, Mx offers the analysis toolkit to help you unlock what your data is telling you.

Intuitive user interface – get started quickly and confidently with a user interface that helps you along. Plus, powerful customization tools enable the quick creation of simple one-click or automation interfaces.

Automated operation – through a graphical interface, Mx allows for easy configuration of fully automated measurement sequences, including multiple field-of-view stitching, tray-based measurements of multiple parts, or complex recipes that analyze multiple aspects of a part. With user-level restrictions and configuration lockdowns, you can be confident that critical metrology won’t be affected by user intervention.