ZYGO Measurement Electronics
ZYGO ZMI™ measurement electronics calculate displacement using optical signals from the interferometers driven by a ZMI™ laser source.
The ZMI™ 501A provides two axes of measurement in a convenient stand-alone enclosure.
The ZMI™ 2400, 4000, and 4100 series boards provide sub-nanometer resolution to service the most challenging position metrology applications. These boards can be modularly added in a VME chassis to provide scalability up to 64 axes of measurements.
For ultimate measurement precision, our patented Cyclic Error Correction option automatically and seamlessly eliminates common non-linear errors intrinsic in DMI systems.
| Model | 501A | 2400 | 4004 | 4104(C) |
| Number of Axes/Board | 2 | 1 or 2 | 4 | |
| Board Type | Enclosure | 6U VME | 6U VME64x | |
| Minimum Optical Power | 8.0 µW | 1.9 µW | 1.0 µW | 0.07 µW |
| Position Resolution | 1.24 nm | 0.31 nm | 0.15 nm | |
| Max. Velocity | ±0.475 m/s | ±2.1 m/s | ±2.55 m/s | |
| Accuracy at Max Velocity (σ) | 1.6 nm | 0.5 nm | 0.2 nm | |
| Cyclic Error Compensation | No | Yes | ||
| Compatible Laser(s) | 7705 | 7702, 7714, and 7724 | ||
| Note: Specifications are for double-pass interferometers. | ||||
ZYGO Nano Position Sensors Brochure
ZYGO ZMI 501A Enclosure Specifications
ZYGO ZMI 2400 Measurement Board Specifications
| Photo | Product | SKU | |
|---|---|---|---|
 | ZYGO ZMI™ Lasers | - | > |
 | ZYGO Interferometers | - | > |