TMC designs and manufactures advanced building floor vibration isolation systems for nanotechnology. TMC isolators support ultra precision measurements, instruments and manufacturing.
They continue to lead the industry with sophisticated active, inertial vibration cancellation systems featuring piezoelectric actuators and digital controllers. Their passive products range from simple, desktop isolated microscope bases, to virtually any size optical table systems.
TMC products enable ultra-precision research, measurements and manufacturing in the fields of photonics, semiconductor manufacturing, life sciences, drug discovery and nanotechnology. TMC products are designed and manufactured at their state-of-the-art, vertically integrated manufacturing facility and are backed by a customer commitment to provide superior global service.
All steel construction. No particle board sidewalls or plastic layer between top skin and honeycomb core. Assures maximum strength and structural integrity
Smallest core cell size, highest core density. The CleanTop design does not require enlarging the steel honeycomb core cell size because CleanTop cups are cylindrical, not conical as found in plastic layer designs. CleanTop's average cell size of 0.5 in.(2) is at least 50% smaller than that achieved with plastic layer designs assuring the highest stiffness and greatest core-to-skin bonding contact area
Steel to steel to steel. CleanTop achieves a spill-proof core with only two bonding layers: top skin to core and core to bottom skin. Imitations must add a third bonding layer which weakens the structure: top skin to plastic layer, plastic layer to core, and core to bottom skin.
Thermal stability. The CleanTop all steel construction assures materials of identical coefficient of thermal expansion ensuring optimal thermal stability.
Patented Everstill technology. Serial type active architecture achieves vibration cancellation starting at 0.5 Hz.
Hybrid design with two stages of isolation. MaxDamp air isolators supported by Everstill. The performance of the two stages is additive.
Advanced vibration sensor technology. Incorporates geophone type velocity sensors for sub-Hz performance. Better low frequency sensitivity than accelerometers.
Ease of installation and setup featuring retractable casters and a roll-off crate.
Vibration isolated lab equipment tables for a wide range of applications including scanning probe microscopy, confocal microscopy, interferometry and optical metrology.
Unique new table-top design (patent pending) combines the best features of TMC's CleanTop steel honeycomb tops with our ultra-stiff, damped, layered platform design.
Greater stability, especially for small size tables. The low profile, high density tops lower the overall floating center-of-mass ensuring inherently stability, even for relatively top-heavy payloads.
Guided thread lead-ins to align screws with tapped holes. The "bevel" shape eases engagement of the first thread.
Ergonomics optimizedfor the seated user by minimizing the thickness of the table-top. Other designs either offer 100 mm, 4 in. thick tops which awkwardly separate knees and elbows or sacrifice essential mass by offering a 50 mm, 2 in. thick honeycomb top which does not have adequate massfor effective vibration isolation, especially for smaller table sizes.
Exceptionally rigid and well damped steel optical breadboards with 2” or 4” thickness in standard rectangular or customised irregular shapes.
All steel construction. No particle board sidewalls or plastic layer between top skin and honeycomb core. Assures maximum strength and structural integrity
Smallest core cell size, highest core density. The CleanTop design does not require enlarging the steel honeycomb core cell size because CleanTop cups are cylindrical, not conical as found in plastic layer designs. CleanTop's average cell size of 0.5 in.(2) is at least 50% smaller than that achieved with plastic layer designs assuring the highest stiffness and greatest core-to-skin bonding contact area
Steel to steel to steel. CleanTop achieves a spill-proof core with only two bonding layers: top skin to core and core to bottom skin. Imitations must add a third bonding layer which weakens the structure: top skin to plastic layer, plastic layer to core, and core to bottom skin.
Thermal stability. The CleanTop all steel construction assures materials of identical coefficient of thermal expansion ensuring optimal thermal stability.
Industry-leading performance resulting from the highest core density and smallest honeycomb cell area in an all-steel construction. Three performance levels and multiple options available.
All steel construction – No particle board sidewalls or plastic layer between top skin and honeycomb core. Assures maximum strength and structural integrity.
Smallest core cell size, highest core density – The CleanTop design does not require enlarging the steel honeycomb core cell size because CleanTop cups are cylindrical, not conical as found in plastic layer designs. CleanTop's average cell size of 0.5 in.(2) is at least 50% smaller than that achieved with plastic layer designs assuring the highest stiffness and greatest core-to-skin bonding contact area.
Steel to steel to steel – CleanTop achieves a spill-proof core with only two bonding layers: top skin to core and core to bottom skin. Imitations must add a third bonding layer which weakens the structure: top skin to plastic layer, plastic layer to core, and core to bottom skin.
Thermal stability – The CleanTop all steel construction assures materials of identical coefficient of thermal expansion ensuring optimal thermal stability.
Machined from solid aluminium with a bonded underside skin to provide the best combination of surface precision with honeycomb rigidity and damping for customised and OEM requirements.
Machined, monolithic aluminum panel ensures precision flatness, parallelism, and hole tolerance can be achieved. Comparable tolerance to machined aluminum plates Honeycomb core machined from solid aluminum plate.
Epoxy bonded face sheet seals honeycomb core and provides additional stiffness and damping Dimensional precision of a machined aluminum plate with the damping and high stiffness-to-mass ratio of a honeycomb breadboard
Air damping combined in series with STACIS active Piezo damping for the ultimate in high and low frequency vibration cancellation. Ideal for the most critical laser applications.
Incorporates patented STACIS® technology
Active inertial vibration cancellation system
Vibration cancellation starts below 1 Hz
Extended stroke piezoelectric actuators, up to 60 microns.
6 active degrees-of-freedom
Consists of two isolation systems in series for maximum vibration isolation
Incorporates patented MaxDamp® Air Isolators
Simple, robust and cost-effective
Optional shelves for mounting equipment under the table
Micro-g Air damped vibration isolation legs to support optical tables - with many configurations of height, weight capacity and vibration isolation performance.
Analog Controller with Digital interface – Analog control of Helmolz-type coils results in more precise real-time cancellation. Digital panel provides simple LCD read-out or PC-based Graphical User Interface (GUI) to the user.
Flexibility for On-site Tuning – Auto-tuning at start up for typical environments and applications, or adjustable on-site tuning for more challenging environments.
Real-Time Monitoring – Continuous monitoring with measured fields displayed via the PC-based GUI allows for fine tuning even without relying on microscope image.
Smallest core cell size, highest core density. The CleanTop design does not require enlarging the steel honeycomb core cell size because CleanTop cups are cylindrical, not conical as found in plastic layer designs. CleanTop's average cell size of 0.5 in.(2) is at least 50% smaller than that achieved with plastic layer designs assuring the highest stiffness and greatest core-to-skin bonding contact area
Steel to steel to steel. CleanTop achieves a spill-proof core with only two bonding layers: top skin to core and core to bottom skin. Imitations must add a third bonding layer which weakens the structure: top skin to plastic layer, plastic layer to core, and core to bottom skin.
Thermal stability. The CleanTop all steel construction assures materials of identical coefficient of thermal expansion ensuring optimal thermal stability.
Hard-Mount Technology – SEM-Base is compatible with internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.
Active Inertial Vibration Cancellation – SEM-Base uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors.
Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.
Hard-Mount Technology – SEM-Base VI is compatible with all internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.
Active Inertial Vibration Cancellation – SEM-Base VI uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors.
Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.
STACIS® 4 is the most advanced active vibration isolation system commercially available. Employing inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion. The STACIS 4 builds upon the success of TMC's proven STACIS technology, which is used by 9 of the top 10 semiconductor manufacturers worldwide.
STACIS Piezoelectric Isolators– Suffer no ill effects from tall, top-heavy payloads. There's no danger of gravitational instability.
Instruments mounted on floor platforms (TEMS)– are among the most vibration-sensitive tools made. STACIS provides the best vibration isolation commercially available with no low-frequency amplification.
Instruments requiring isolation– typically incorporate an internal, built-in vibration isolation system. This system is generally a low-frequency air isolator which, in general, should not be supported by another low-frequency air isolation system. STACIS is compatible being "stacked" beneath any tool's internal isolation system.
**The market leading STACIS III is being replaced in Q2 2024 by a new and improved STACIS 4, with even higher performance for the most demanding applications**
Designed to filter out floor motion using inertial vibration sensors and piezo actuators with complex control algorithms. Can be used in series with air damped supports to completely cancel environmental vibration at low and high frequencies.
Hundreds of times stiffer than air isolators – STACIS suffers from none of the limitations of air vibration isolation systems. There is no "soft" suspension and, unlike active air systems, STACIS can be placed beneath a tool with an internal active air isolation system with both systems fully optimized.
The unique serial design and proprietary high-force piezoelectric technology – results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, truly active vibration isolation with 90% vibration reduction starting at 2 Hz.
Incorporates STACIS– TMC's active piezoelectric vibration cancellation technology is unmatched in the industry, with its "hard mount" design and isolation starting at 0.6 Hz, compatible with tools incorporating internal isolators.
Modularity, customisation and relocation flexibility– Each platform is individually tailored to the customer's application but can easily be reconfigured if the tool or the floor characteristics change, unlike concrete plinths.
Expertise– TMC has broad experience working with the world's leading semiconductor manufacturers, scientific facilities and ultra-precision OEMs. TMC know their customers and their needs. TMC design and manufacture in-house.
All steel construction. No particle board sidewalls or plastic layer between top skin and honeycomb core. Assures maximum strength and structural integrity
Smallest core cell size, highest core density. The CleanTop design does not require enlarging the steel honeycomb core cell size because CleanTop cups are cylindrical, not conical as found in plastic layer designs. CleanTop's average cell size of 0.5 in.(2) is at least 50% smaller than that achieved with plastic layer designs assuring the highest stiffness and greatest core-to-skin bonding contact area
Steel to steel to steel. CleanTop achieves a spill-proof core with only two bonding layers: top skin to core and core to bottom skin. Imitations must add a third bonding layer which weakens the structure: top skin to plastic layer, plastic layer to core, and core to bottom skin.
Thermal stability. The CleanTop all steel construction assures materials of identical coefficient of thermal expansion ensuring optimal thermal stability.
