TMC SEM Base LP for Thermo Fisher
- Hard-Mount Technology – SEM-Base is compatible with internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.
- Active Inertial Vibration Cancellation – SEM-Base uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors.
- Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.
SEM-Base LP is a custom, low profile version of the standard TMC SEM-Base active piezoelectric vibration cancellation platform. SEM-Base LP is easier to install, provides outstanding performance, and is ergonomically optimized. The compact design facilitates installation without lifting the Scanning Electron Microscope (SEM) column with anything other than the SEM’s built-in leveling feet. And, once installed, the SEM’s height above the floor does not increase. SEM-Base LP incorporates a unique STACIS piezo technology and has the same vibration cancellation performance as the industry-standard SEM-Base VI. SEM-Base LP includes casters and is designed specifically to integrate with many Thermo Fisher Scientific (formerly FEI) tools.
SEM-Base LP is compatible with many Thermo Fisher Scientific models including:
- Apreo
- Aquilos
- Helios 5
- Nova NanoSEM x50
- Prisma
- Quattro S
- Scios
- Teneo
- Verios 5
- Versa 3D
Performance Specifications
| Active degrees of freedom | 6 |
| Active bandwidth | 0.6 Hz - 100 Hz |
| Passive natural frequency | 12 Hz nominal |
| Effective active resonant frequency | 0.5 Hz |
| Isolation at 1 Hz | 40% - 70% |
| Isolation at 2 Hz | 90% |
| Isolation at ≥3 Hz | 90-98% |
| Internal noise | <0.1 nm RMS |
| Operating load range | 900 - 2,500 lbs (408 - 1134 kg) |
| Magnetic field emitted at maximum 4 in.(102 mm) from the platform |
<0.02 μG broadband RMS |
Design, Dimensions, and Environmental and Utility Requirements
| Environmental and safety | CE and RoHS compliant |
| Active isolation elements | High-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC |
| Passive isolation element | single stiff elastomer (no compressed air supply required) |
| Vibration sensor elements | Downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion |
| Active feedback control loop | Floor vibration is measured, processed and attenuated below the spring supporting the isolated surface |
| Dimensions (WxD) | 33.3 x 34.9 in. | 846 x 887 mm 41 x 34.9 in. | 1041 x 887 mm total with casters |
| Height | 5.26 in. (134 mm) nominal, doesn't change when SEM-Base is switched off |
| Operating temperature | 50° - 90° F 10° - 32° C |
| Storage temperature | -40° - 130° F -40° - 55° C |
| Humidity | < 80% @ 68° F | 20° C, maximum dewpoint 18 degrees C |
| System power requirements | 100, 120, 230, 240 VAC 50/60 Hz AC; <600 W CE compliant |
| Floor displacement | <800 μin. (20 μm) below 10 Hz |
Controller Specifications
| Processor | 150/75 MHz dual core |
| Sampling rate | 10 kHz |
| Analog outputs | 16 channels |
| Analog inputs | 16 channels |
| Status light | single LED |
| Front panel ports | 1x serial USB 2.0 1x serial Micro-USB 1x Ethernet RJ-45 2x BNC |
| User interface | Front panel LCD display Character menu on HyperTerminal Extended GUI for Microsoft Windows Embedded Ethernet GUI |
TMC SEM-Base for Thermo Fisher Scientific Datasheet | Photo | Product | SKU | |
|---|---|---|---|
 | TMC SEM-Base VI Piezoelectric Vibration Cancellation Platform | - | > |
 | TMC STACIS Quiet Island Large Vibration Isolation Platform | - | > |
 | TMC STACIS III Active Vibration Cancellation System | - | > |
 | TMC STACIS 4 Piezoelectric Active Vibration Cancellation | - | > |
 | TMC Mag-NetX Active Magnetic Field Cancellation | - | > |
 | TMC SEM-Closure Acoustic Enclosure | - | > |
 | TMC STACIS Floor Platform | - | > |