Opto Alignment QuickPRO-3D™

Product Code:

QuickPRO-3

Manufacturer: Opto Alignment

Bench-Top, High-Speed, High-Accuracy, Non-Contact 3D Surface Profiler

SYSTEM CHARACTERISTICS

Compact, bench-top unit with environmental enclosure
Non-contact chromatic confocal sensor (Point or Line Scan)
3D surface topography and transparent film thickness
Integrated CMOS camera with co-axial or ring illumination
Nanometer encoded X/Y/Z motion with magnetic linear motors and cross roller bearings
Available vacuum chucks for sample/tray holding
User friendly CalcuSurf3D™ Recipe Generation, Data Acquisition, and Surface Analysis software permits optimized measurement sampling density for best coverage at highest throughput
Extensive 3D Surface plotting and data reporting functions conforming to DIN ISO

APPLICATIONS

SYSTEM
Dimensions (L x W x H)	535 x 380 x 510 [mm]
Weight	Approx. 60 kg
System Controller	Includes motion control, sensor control, power supplies, ethernet interface to PC
Power Requirements	110-220V AC, 50-60 Hz, 1 phase, 2 amps (220V), 5 amps (110V)
MOTION
Stage Travel (Xx Y x Z)	100 mm x 100 mm x 50 mm
Encoder Resolution (X x Yx Z)	20 nm x 20 nm x 1 nm
Drive Type	Magnetic linear motor
Bearing Type	Cross Roller Bearing
Flatness	Approx. 1 µm/100 mm
Load Capacity	5 kg
SENSOR
Technique	Chromatic Confocal (Point & Line Scan)
Applications	Distance, Thickness
Sampling	Point: 4,000 points/sec, Line Scan: 384,000 points/sec
Available Probes	0.2mm	1 mm	4mm
Lateral Resolution	1.7 µm	2.5 µm	4µm
Working Distance	5mm	16 mm	37 mm
Vertical Resolution	8nm	40 nm	160 nm
Vertical Accuracy	150 nm	400nm	1.6 µm
Maximum Slope	± 45°	±28°	±20°
Thickness Measuring Range*	up to 0.3 mm	up to 1.5 mm	up to 6 mm

*refractive index n=1.5

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