Opto Alignment QuickOCT-4D™
Bench-Top, High-Speed, High-Accuracy, Non-Contact 4D Surface & Thick-Film Profiler
Combining a single-point, visible-light, spectral-domain optical coherence tomography (SD-OCT) sensor with a high-speed, nanometer-encoded X/Y/Z motion-control stage, the QuickOCT-4D™ can capture the plane of each layer within transparent film samples in a single measurement, at up to 66 kHz. The QuickOCT-4D™ penetration depth (up to 100µm) and axial resolution (5nm) is optimized for the measurement of multi-layer transparent films, flat substrates, and functional layers in the semi-conductor, life science and pharmaceutical industries.
SYSTEM CHARACTERISTICS
- Compact, bench-top unit with environmental enclosure
- Single-point, non-contact, visible-light, Spectral-Domain Optical Coherence Tomography (SD-OCT) sensor with up to 66 kHz measuring rate
- Optimized for measuring topography and thickness of multi-layer transparent films on highly reflective material
- Nanometer encoded X/Y/Z motion with magnetic linear motors and cross roller bearings for fast raster or spiral scanning over 100mm (X), 100mm (Y), 50mm (Z)
- Available vacuum chucks for sample and tray holding
- User-friendly CalcuSurf-4D™ recipe generation, data acquisition, surface topography and multi-layer film analysis software permits optimized measurement sampling density for best coverage at highest throughput
APPLICATIONS
An ideal application for the QuickOCT-4D™ is the measurement of patterned photoresist (or similar transparent coatings) on a silicon, GaAs or glass wafer for backend semiconductor, advanced packaging, display, LED, VCSEL and MEMS as a quality control post-develop and pre-etch.
| SYSTEM | |||
| Dimensions (L: W: H) | 535 x 380 x 510 [mm] | ||
| Weight | Approx. 60 kg | ||
| System Controller | Includes motion control, sensor control, power supplies, ethernet interface to PC | ||
| Power Requirements | 110-220V AC, 50-60 Hz, 1 phase, 2 amps (220V), 5 amps (110V) | ||
| MOTION | |||
| Stage Travel (X: Y: Z) | 100 mm x 100 mm x 50 mm | ||
| Encoder Resolution (X : Y : Z) | 5 nm x 5 nm x 1 nm | ||
| Drive Type | Magnetic linear motor | ||
| Bearing type | Cross Roller Bearing | ||
| Flatness | Approx. 1 µm/100 mm | ||
| Load Capacity | 5 kg | ||
| SENSOR | |||
| Technique | Spectral-domain, low-coherence interferometry | ||
| Applications | Distance, Thickness | ||
| Sampling | Point: up to 66,000 points/sec | ||
| Available Probes | VIS-1 | VIS-2 | IR |
| Lateral Resolution | 5µm | 6µm | 6µm |
| Working Distance | 5 mm | 10 mm | 40 mm |
| Axial Resolution | 1 nm | 2nm | 5nm |
| Axial Accuracy | 25 nm | 50 nm | 500 nm |
| Maximum Slope | ± 20 | ±10° | ±5° |
| Thickness Measuring Range* | 1 to 80 µm | 2 to 180 µm | 29 to 3200 µm |
*optical length
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