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Join Fischione Instruments and NanoElectronic Imaging to learn more about a significant advancement in specimen preparation for STEM EBIC failure analysis.

Electrical characterization and transmission electron microscopy (TEM) are crucial for semiconductor failure analysis. The scanning TEM electron beam-induced current (STEM-EBIC) imaging method integrates these techniques by performing electrical characterization at each STEM image pixel using the electron beam as a localized current source. The analyses produce both standard STEM images and electronic maps.

Successful STEM-EBIC imaging of devices requires careful specimen preparation because STEM-EBIC is highly sensitive to surface contamination and leakage paths. These factors are significantly influenced by artifacts introduced during focused ion beam (FIB) preparation, particularly when using conductive gallium (Ga) ions.

Annular dark-field STEM (ADF STEM) and STEM EBIC images were acquired from a 7 nm finFET device following Ga FIB and subsequent post-FIB Ar ion milling. Post-FIB Ar ion milling significantly improved sample quality, revealing well-defined interfaces and Si stringers resulting from fin cuts during device fabrication (left). Notably, only STEM EBIC imaging exhibited a clear distinction between active and inactive fin structures (right).

In this webinar, we discuss the use of STEM-EBIC to assess the surface quality of TEM specimens from advanced finFET devices and to characterize their electronic properties at high resolution. Post-FIB Ar ion milling using the Fischione Instruments' PicoMill® TEM specimen preparation system significantly enhances specimen quality by effectively removing Ga ion implantation and amorphous damage induced by FIB milling. NanoElectronic Imaging's Two-Channel STEM EBIC System for STEM-EBIC analysis reveals a clear differentiation between inactive and active finFET structures, which highlights the substantial improvements in sample quality achieved through post-FIB Ar ion milling.

Join Cecile Bonifacio and William Hubbard for this exciting webinar.

Cecile Bonifacio, Senior Applications Scientist, Fischione Instruments

Dr. Cecile Bonifacio focuses on the development of TEM applications for material science and provides application support for the TEM sample preparation products and cryo-transfer TEM holder product line through customer training and demonstrations.

William Hubbard, CEO, NanoElectronic Imaging

Dr. William A. Hubbard is the CEO of NanoElectronic Imaging, Inc., where his research is focused on the development of electron microscopy techniques, such as STEM EBIC, which can visualize electronic and thermal contrast in operating nanodevices.

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