
Zygo Corporation announced the introduction of the
ZeGage™ Plus optical profiler, a full-featured instrument for the 3D measurement of surface topography and roughness. The system provides the same ease of use, vibration robustness and small footprint as the ZeGage profiler but with a higher level of precision, faster measurement speed, and an increased range of measurable surfaces and features.
"The
ZeGage™ Plus is the ideal instrument not only for precision machining applications but also for optical surfaces and precision microstructures that require sub-nanometer vertical precision," notes Eric Felkel, Optical Profiler Product Manager for Zygo. "Precision machining customers, who may have relied previously on stylus profiling, can now gain the benefits of fast, highly repeatable, non-contact area measurement by adopting the ZeGage profiler. Users of the
ZeGage™ Plus model maintain that ability but with higher precision and a high-speed measurement mode for faster throughput."
A High-Performance, Cost-Effective Production Profiler
Manufacturers, who use the high-performance version of Zygo's entry-level profiler, will now appreciate the faster top measurement speed – which increases throughput – as well as the low cost of ownership. ZYGO's proprietary SureScan™ technology eliminates the need for a vibration isolation system, keeping down the total cost of operation as well the laboratory footprint.
Operators also will be drawn to the system's ability to measure and analyze virtually any surface – rough or specular, transparent or opaque, high or low reflectivity. Competitively, the
ZeGage™ Plus is a more tightly integrated system that is better suited for production applications than other non-contact profilers at its price point.
The ZeGage Plus utilises Zygo's proprietary Mx™ software, for enhanced data visualisation and quantification of step heights, texture, and volumetric applications. This highly-optimised metrology software for data acquisition and analysis provides added capabilities for regions analysis and advanced patterns. ZeGage Plus profilers, with optional automated X/Y sample stages, have the added ability to combine overlapping measurements for the characterisation of larger areas.
Magnification Objectives and Accessories Offered for Wide Range of Applications
Zygo's wide range of highly optimised
objectives provides the user with the ability to select the desired magnification and field of view without affecting height precision. Many of Zygo's extensive list of parfocal objectives can be used with
ZeGage™ Plus profilers, from 1.4x to 50x, as well as 1x to 10x long working distance, and a 5x super-long working distance lens.
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Zygo Corporation, a unit of AMETEK Ultra Precision Technologies Division