MProbe 40 Series: MSP
The MProbe 40 is a complete thin-film measurement system. Select the model and options the fit best for your application requirements or let us know your application and we will help to select.
You’ll be ready to start measurements everything is included.
Our extensive materials library has 500+ materials, with easy import/creation of the new materials and support for a wide range of parametrized materials (from Cauchy to Tauc-Lorentz) is included.
One-click measurement combines data acquisition (reflection or transmittance spectrum) and data analysis.
Of course, we have all the sophisticated tools including sensitivity analysis, error-estimator, simulation, filmstack switching, global optimization, layers and materials linking, etc. for complicated applications development
Reflectance and transmittance spectral data can also be used as a raw measurement (for example, as in spectrophotometer) or a for a wide range of other applications.
What’s in the box?
- Main unit: includes spectrometer(s), light source (UV models) , electronics (50W halogen light source is included in microscope illuminator)
- Fiberoptic probe
- Upright inspection microscope with four long WD objectives-95 mm parfocal length (UV and NIR models have three visible and one UVVisNIR achromatic 8x objective)
- TFCompanion -R software Advanced version (USB dongle (license key), Software, user guide and other materials on USB memory stick )
- Calibration sample (Si or Al depending on the model) and black absorber pad
- Test sample- 200nm oxide wafer
- USB cable (connecting main unit to computer)
- Universal power adapter (110V/220V)
In addition, MProbe includes the following Semiconsoft advantages:
- Library with over 500 materials and support for parameterized materials
- 12 months of free software updates and application support
- Hardware upgrade program
Why use MProbe 40
Micro spot: measure with spot size < 4 µm
Flexible: select the best hardware configuration for your application. MProbe model and options. Already have microscope? We can help to integrate…
Affordable: up to 50% savings as compared to other commercial instruments
Precision: unmatched precision <0.01nm or 0.01%
Materials database: extended database (500+ materials) is included
Software: flexible, user friendly and powerful software; integrated control/data acquisition and data analysis; any filmstack: no limits on number of layers, support inhomogeneous and thick incoherent layers, surface roughness, multi-sample analysis, etc.
Technical support: application and technical support.
Options
| Option | Description | Comments | |
|---|---|---|---|
| MXY[6 or 8 or 12] | Motorized XY stage 6” x6” (150mm) or 8”x8” (200mm) or 12’x12″(300mm) Controller and software support for mapping is included. 0.5 mm step size 1 mm repeatability | 8”x8” manual stage is included as standard with all models | |
| TOM | Transmittance measurement configuration. Includes: glass insert for stage and light source/condenser and fiber optics | for Vis and IR models | |
| Microscope Adapter | Allows imaging of the sample with measurement spot at the time of measurement (no change of optical path). Includes SCMOS Camera. Can be attached to camera port any upright microscope (C- Flange compatible) | ||
| CCD | Eyepiece camera (2MP) | other cameras are available | |
| APO100 | APO 100x objective (visible) 95mm parforcal length R=0.7um | 10x 20x 50x and 8x UVVisNIR (for relevant systems) are standard |
MProbe 40 MSP System Standard Configurations
| Model | Wavelength range(nm) | Spectrometer/Detector | Lightsource | Thickness |
|---|---|---|---|---|
| Vis-MSP | 400-1000 | Spectrometer F4/Si CCD 3600 pixels/ ADC- 16 bit | Tungsten-Halogen | 10nm- 75µm |
| UVVisSR-MSP | 200-1000 | Spectrometer F4/Si CCD 2048 pixels/ ADC- 16 bit | Deuterium/Tungsten-Halogen | 1nm-75µm |
| HRVis-MSP | 700-1100 | Spectrometer F4/Si CCD 2048 pixels/ ADC- 14 bit /resolution | Tungsten-Halogen | 1µm-400µm |
| NIR-MSP | 900-1700 | F4 Spectrometer InGaAs CCD 512 pixels: ADC- 16 bit | Tungsten-Halogen | 50nm- 85µm |
| VisNIR-MSP | 400-1700 | Two spectrometer channels/ detectors (F4 Si 3600 pixels CCD and F4 InGaAs 512 pixels PDA) /ADC- 16 bit | Tungsten-Halogen | 10nm- 85µm |
| UVVisNIR-MSP | 200-1700 | Two spectrometer channels/ detectors (F4 Si 2048 pixels CCD and InGaAs 512)/ ADC – 16 bit | Deuterium/Tungsten-Halogen | 1nm-85µm |
| VisXT-MSP | 800-870 | F4 spectrometer/InGaAs 512 pixels PDA | Tungsten-Halogen | 10µm-1400µm |
Semiconsoft TF Companion Software Brochure
Semiconsoft Spectroscopic Reflectance for thin film measurement
Semiconsoft Microscope Adapter Brochure
Semiconsoft Microscope Thin Film Measurement System
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