• Hard-Mount Technology – SEM-Base VI is compatible with all internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.
• Active Inertial Vibration Cancellation – SEM-Base VI uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors. 
• Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.

• Hard-Mount Technology – SEM-Base is compatible with internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.
• Active Inertial Vibration Cancellation – SEM-Base uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors. 
• Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.

• Incorporates STACIS – TMC's active piezoelectric vibration cancellation technology is unmatched in the industry, with its "hard mount" design and isolation starting at 0.6 Hz, compatible with tools incorporating internal isolators.
• Modularity, customisation and relocation flexibility – Each platform is individually tailored to the customer's application but can easily be reconfigured if the tool or the floor characteristics change, unlike concrete plinths.
• Expertise – TMC has broad experience working with the world's leading semiconductor manufacturers, scientific facilities and ultra-precision OEMs. TMC know their customers and their needs. TMC design and manufacture in-house.

**The market leading STACIS III is being replaced in Q2 2024 by a new and improved STACIS 4, with even higher performance for the most demanding applications**

Designed to filter out floor motion using inertial vibration sensors and piezo actuators with complex control algorithms. Can be used in series with air damped supports to completely cancel environmental vibration at low and high frequencies.

• Hundreds of times stiffer than air isolators – STACIS suffers from none of the limitations of air vibration isolation systems. There is no "soft" suspension and, unlike active air systems, STACIS can be placed beneath a tool with an internal active air isolation system with both systems fully optimized.
• The unique serial design and proprietary high-force piezoelectric technology –  results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, truly active vibration isolation with 90% vibration reduction starting at 2 Hz.

STACIS^® 4 is the most advanced active vibration isolation system commercially available. Employing inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and contracting piezoelectric actuators to filter out floor motion. The STACIS 4 builds upon the success of TMC's proven STACIS technology, which is used by 9 of the top 10 semiconductor manufacturers worldwide.

• Analog Controller with Digital interface – Analog control of Helmolz-type coils results in more precise real-time cancellation. Digital panel provides simple LCD read-out or PC-based Graphical User Interface (GUI) to the user.
• Flexibility for On-site Tuning – Auto-tuning at start up for typical environments and applications, or adjustable on-site tuning for more challenging environments.
• Real-Time Monitoring – Continuous monitoring with measured fields displayed via the PC-based GUI allows for fine tuning even without relying on microscope image.

• Main Door – 36" wide allowing full access to front of SEM. 24" side module also includes a door on front side. Several hinged doors allow easy access to any side of the SEM for sample preparation, adjustment of accessories and maintenance. Bi-fold doors on sides and rear help minimize clearance requirements. Optional quarter-panel door for quick and easy access. Model shown is number 30-202-12-24
• Top Panel – Includes easy-open space-saving hatch door for access to top of SEM. Cam-Lock ensures tight seal.
• Latches – All doors include easy-to-open latches, and tight seal when closed. All panels constructed of TMC proprietary acoustic layering with powder coated steel exterior.

• STACIS Piezoelectric Isolators – Suffer no ill effects from tall, top-heavy payloads. There's no danger of gravitational instability.
• Instruments mounted on floor platforms (TEMS) – are among the most vibration-sensitive tools made. STACIS provides the best vibration isolation commercially available with no low-frequency amplification.
• Instruments requiring isolation – typically incorporate an internal, built-in vibration isolation system. This system is generally a low-frequency air isolator which, in general, should not be supported by another low-frequency air isolation system. STACIS is compatible being "stacked" beneath any tool's internal isolation system.