Home Probe Stations RF Probing & Accessories EverBeing EB-6V MMWAVE THz Wafer Probe Station

EverBeing EB-6V MMWAVE THz Wafer Probe Station

Product Code:
EB-6V
Manufacturer: EverBeing

EverBeing offer a range of Millimeter-Wave Probe Stations for precise integration with your existing Vector Network Analysers (VNA), wave guides and frequency extenders from leading brands like Anritsu, Keysight, Rohde & Schwarz, VDI, OML. Two models are available EB-6A and EB-6V to accommodate the different sizes of waveguides and frequency extenders you prefer.

The EB-6V is designed to work with Keysight, Rohde & Schwarz, VDI, and OML mmWave frequency extender modules.

The EB-6A is designed specifically to work with Anritsu range of equipment and frequency extender modules.

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The EB-6V is a market proven solution for mmW research. Designed in conjunction with Keysight, Rohde & Schwarz, VDI, and OML, the following features are available to the system:

  • Customised positioners to reduce waveguides between millimeter-wave modules and probe head
  • Firm and stable positioners for extenders and tuners of all sizes
  • Integrated dial gauge determining contact scratch on probes
  • Precise integration allowing direct link of probes
  • North and south bridge for additional DC and RF micropositioners
  • Coaxial style high precision stage
  • Back-lash free movement
  • Micropositioner standby dock

Applications

  • High performance RF
  • Single broadband probing
  • Differential mm-Wave
  • Basic DC (IV/CV)

Accessories

  • Hot chuck with auxiliary chuck with temperature controller
  • Vibration free table
  • Shielding box
Station Specifications
Station Footprint  760 mm W x 660mm D
Station Height  450 mm (to Platen)/700 mm (to Microscope)
Station Weight  80kg
Platen Material  Hard Chrome Plated Steel
Platen Dimension  120 mm x 180 mm (North and South)
Platen Capacity  12 DC or 4 RF and 4 DC
Positioner Mount  Magnetic ON/OFF Switch
No. of Vacuum Switches  4
Chuck Material  Stainless Steel
Chuck Stage Type Coaxial
Chuck Travel Range  6” x 6”
Chuck Fine Resolution  1 μm
Chuck Theta Coarse Travel  360˚
Chuck Theta Fine Resolution  0.01˚
Chuck Z-Motion Range  4 mm
Chuck Z-Fine Resolution  1 μm
Coaxial Chuck Movement  Bevelled Gear and Rack 0.8 mm Pitch
Chuck Size  6” (150 mm)
Chuck Planarity  3 μm
Chuck Rigidity  15 μm / 10 N @ edge
Chuck Vacuum Grooves  Centre, 1.5”, 3.5”,7” (Individually Controlled)
Chuck Bias Capacity  Up to 2 kV
Chuck Isolation  5 GΩ
DUT Size Range  2 mm - 150 mm
Microscope Stage Type  High Precision Linear Stage
Microsope Stage Resolution  1 μm
Microscope Stage Travel Range  2” x 2”
Microscope Z-Lift (Optional)  6 mm (Pneumatic)
Microscope Zoom Range  1x - 2x
Microscope Eye Piece  10x
Microscope Objectives  2x, 10x, 20x
Microscope Magnification Range 20x-400x
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